Dense and defect-free films
Thin films produced by spatial ALD are typically denser and have fewer defects compared to those produced by conventional methods like sputtering or chemical vapor deposition (CVD).
Spatial ALD provides atomic-level control over film thickness, resulting in extremely uniform and conformal layers even over large areas and complex topographies. This is essential for ensuring better barrier properties, consistent performance across the entire display and improved device longevity.
Roll-to-Roll production
Our helical web transport is the only commercially available system that can produce the barrier layers for encapsulation of OLED displays at an uptime and production speeds required by the industry. Many layers can be made in one process making it the ideal method for depositing a multilayer barrier coating fast, thin, and cheap. Operating at low temperatures, the roll-to-roll production machine is easy to integrate in the existing production lines, replacing expensive encapsulation foils.
How spatial ALD benefits OLED displays
Ultra-thin barrier layers
Barrier layers applied with spatial ALD can be much thinner and require less material compared to conventional barrier layers while maintaining the high water and oxygen barrier properties due to the high uniformity of the layer.
3D uniformity
The fundamental properties of the self-limiting surface reaction of spatial ALD make it very suitable to coat substrates with high aspect ratios and even porous materials that are used in the next generation of OLED screens, enabling a.o. better anti-reflective layers.
Improved business case
Light weight thin films applied with spatial ALD equipment compatible with existing production lines, use less material, reducing the total cost per area produced and improving the business case.
Spark your imagination
Are you currently producing thin film material and interested in exploring the advantages of nano coating for your product? Discover how our thin film equipment can help you disrupt your sector and download the product sheet.