Thin film PV

Our Superspatial ALD systems can produce high quality barriers for thin film PV at a much lower price point than the currently available ‘ready to apply’ foils.

Besides this barrier layer, our systems can produce other layers in the PV stack that have to be thin, dense, without pinholes and compatible with the sensitive active material, such as buffer layers or transparent electrodes. sALD is the ultimate method for such layers, because it uses no high temperatures or high energies. With our Superspatial systems, multiple layers can be deposited in one process.

Other applications


Superior thickness control and high conformality make sALD the only feasible method to coat porous battery electrodes. Such coatings can suppress unstable SEI formation...


sALD us the ideal method for producing flexible ultra-barriers are organic/inorganic stacks to prevent moisture from penetrating through pinholes in the inorganic layers.